1 中国北京 100083 中国科学院半导体研究所光电系统实验室; 2 中国北京 100049 中国科学院大学材料科学与光电技术学院 1 Optoelectronic System Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; 2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China